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Sico high purity silicon wafer carriers

Code Silicon Product
Series NA
Protection NA
Brand Sico
Datasheet Silicon Product
Detail

Sico high purity silicon wafer carriers

  • for wafers from 2” up to 12 “ diameter

  • slot width starting at 0,3 mm

  • slot configuration allows a wafer capacity of 1 to 400

  • horizontal or vertical design

  • available as plates, tubes or profile carriers

  • carriers are compatible with automated wafer transport systems

  • for all major furnace systems, ASM, Tokyo Electron, Kokosai and others

  • for high temperature processes up to 1200°C