Detail
OEM high purity silicon wafer carriers
for wafers from 2” up to 12 “ diameter
slot width starting at 0,3 mm
slot configuration allows a wafer capacity of 1 to 400
horizontal or vertical design
available as plates, tubes or profile carriers
carriers are compatible with automated wafer transport systems
for all major furnace systems, ASM, Tokyo Electron, Kokosai and others
for high temperature processes up to 1200°C